EPI Facilities EPI TECH  |  EPI Process  |  EPI Products  |  EPI Facilities
 Reactor Used       
  • MT7700K & MT7811K with expansion kits
  • RF Pancake reactor EpiPro5000
  • Single wafer reactor
  • LPE3061 & 2061 Reactors
MT Series Reactor capability  Single wafer reactor capability RF pancake reactor capability
  • Good surface quality and slip performance
  • Face thickness uniformities of ±4% for 6' wafers
  • Face resistivity uniformities of ±4% for 6' wafers
  • Sharp transition layer with developed recipe
  • Reduced pressure
  • Outstanding uniformity in thickness and   resistivity;
  • Unmatched process capability
  • Thin Epi capability
  • 8' Epi capabilit
  • High throughput
  • Extremely sharp doping transition
  • Excellent uniformity in thickness and resistivity
  • Large batch sizes and dual-chamber design
  • Thick Epi capability
  • Epi Facilities     

     

    MT Barrel

    LPE 2061

    CSD

    G2

    LPE 3061

    ASM E2000


     In-House Measurement Capabilities

    • Simgui also introduced a set of qualified and advanced metrological and back-up facilities to ensure Simgui's EPI wafers meet, or even exceed, the industry's standards.
        


    MCV530


    SSM495Hg-Probe CV System


    CDE 4-Point Probe


    Surface scan SP1


    QS2200M Accent FTIR


    ADE 9300


    SSM SRP 2000


    Agilent ICP MS7500CS


    OLYMPUS 公司的MX50


      Back-up Facilities 
    Ultra-pure water meeting the need for device manufacture at very deep sub-micrometer level.
    Wafer cleaning process operating in Cobra VcS SA(Verteq, USA). The Combination of ultra-dilute chemistries, advanced megasonics, and the VcS process result in highefficiency removal of particle, metal and organic on wafer surface. Additionally, ultra-clean chemical deliver systems from SEMCO(USA) supply Cobra VcS with high purity chemicals.
    Simgui gains the strength from its US-based parter, More Technologies,the acknowledged specialist in epitaxial technology. Simgui is benefiting from close collaboration with such leading substrate suppliers at home and abroad as Forrotec, Gritek and etc. Combing the effective, stable supply channels and its powerful, flexible processing ablility, Simgui has distinguished itself among its domestic and oversea competitors.
    Address: 200 Xinlai Road, Jiading District Shanghai 201815, PRC Tel: +86-21-6952 2599 Fax: +86-21-6952 2221