EPI Facilities EPI TECH  |  EPI Process  |  EPI Products  |  EPI Facilities
Reactor Used
  • MT7700K & MT7811K with expansion kits
  • RF Pancake reactor EpiPro5000
  • Single wafer reactor
  • LPE3061 & 2061 Reactors
MT Series Reactor capability Single wafer reactor capability RF pancake reactor capability
  • Good surface quality and slip performance
  • Face thickness uniformities of ±4% for 6' wafers
  • Face resistivity uniformities of ±4% for 6' wafers
  • Sharp transition layer with developed recipe
  • Reduced pressure
  • Outstanding uniformity in thickness and   resistivity;
  • Unmatched process capability
  • Thin Epi capability
  • 8' Epi capabilit
  • High throughput
  • Extremely sharp doping transition
  • Excellent uniformity in thickness and resistivity
  • Large batch sizes and dual-chamber design
  • Thick Epi capability
  • Epi Facilities



    LPE 3061

    ASM E2000

    In-House Measurement Capabilities

    • Simgui also introduced a set of qualified and advanced metrological and back-up facilities to ensure Simgui's EPI wafers meet, or even exceed, the industry's standards.


    SSM495Hg-Probe CV System

    CDE 4-Point Probe

    Surface scan SP1

    QS2200M Accent FTIR

    ADE 9300

    SSM SRP 2000

    Agilent ICP MS7500CS

    OLYMPUS 公司的MX50

    Back-up Facilities
    Ultra-pure water meeting the need for device manufacture at very deep sub-micrometer level.
    Wafer cleaning process operating in Cobra VcS SA(Verteq, USA). The Combination of ultra-dilute chemistries, advanced megasonics, and the VcS process result in highefficiency removal of particle, metal and organic on wafer surface. Additionally, ultra-clean chemical deliver systems from SEMCO(USA) supply Cobra VcS with high purity chemicals.
    Simgui gains the strength from its US-based parter, More Technologies,the acknowledged specialist in epitaxial technology. Simgui is benefiting from close collaboration with such leading substrate suppliers at home and abroad as Forrotec, Gritek and etc. Combing the effective, stable supply channels and its powerful, flexible processing ablility, Simgui has distinguished itself among its domestic and oversea competitors.
    Address: 200 Xinlai Road, Jiading District Shanghai 201815, PRC Tel: +86-21-6952 2599 Fax: +86-21-6952 2221